JPH0417862Y2 - - Google Patents
Info
- Publication number
- JPH0417862Y2 JPH0417862Y2 JP15987688U JP15987688U JPH0417862Y2 JP H0417862 Y2 JPH0417862 Y2 JP H0417862Y2 JP 15987688 U JP15987688 U JP 15987688U JP 15987688 U JP15987688 U JP 15987688U JP H0417862 Y2 JPH0417862 Y2 JP H0417862Y2
- Authority
- JP
- Japan
- Prior art keywords
- thermal expansion
- bolt
- high thermal
- threaded part
- expansion material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 6
- 239000002023 wood Substances 0.000 claims 1
- 229910000838 Al alloy Inorganic materials 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Connection Of Plates (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15987688U JPH0417862Y2 (en]) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15987688U JPH0417862Y2 (en]) | 1988-12-08 | 1988-12-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0280210U JPH0280210U (en]) | 1990-06-20 |
| JPH0417862Y2 true JPH0417862Y2 (en]) | 1992-04-21 |
Family
ID=31441462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15987688U Expired JPH0417862Y2 (en]) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417862Y2 (en]) |
-
1988
- 1988-12-08 JP JP15987688U patent/JPH0417862Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0280210U (en]) | 1990-06-20 |
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